Об электронной керамике Введение

Electronic Ceramics | Application Prospects of Electrically Insulating Ceramics

Dielectric ceramics are widely used in the manufacture of integrated circuit substrates due to their high strength, low dielectric loss, heat resistance, and stability. For example, beryllium oxide, aluminum oxide, aluminum nitride and silicon carbide can be widely used as ceramic materials for integrated circuit substrates. Among them, beryllium oxide limits its use due to complex manufacturing process, high toxicity and high cost; and the thermal conductivity of silicon carbide Although it is superior to alumina, and the high-performance substrate made by hot pressing method can still meet practical requirements at about 200 degrees Celsius, its development is also limited due to the complex hot pressing sintering process and toxic additives; nitrogen Although the other electrical properties of aluminum are roughly equivalent to those of alumina ceramics, its thermal conductivity is about 10 times that of alumina ceramics, so it is very likely to become the next-generation high-quality substrate material for VLSI.